早在1973年，SEMI就开始与会员公司一起制定晶圆尺寸等半导体行业标准，目前已有800多条国际标准在半导体制造、平板显示等多项领域得到普遍运用。
从2007年开始，随着光伏行业的蓬勃发展，SEMI开展推动在光伏领域的标准制定工作。目前已经成立了北美、欧洲、日本、台湾地区在内的技术委员会，接近20个任务小组或工作小组，覆盖了包括硅材料、硅片、晶体电池、晶体组件、薄膜、原材料、测试方法、设备接口等在内的多个领域。
截止2010年10月18日，SEMI已共计发布了23条光伏行业相关标准，在全球业界得到广泛应用和推崇。这些SEMI光伏行业标准包括：
. E10-0304E——设备可靠性、可用性和可维护性定义说明：Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
. F47-0706——半导体工艺设备电压暂降预防说明：Specification for Semiconductor Processing Equipment Voltage Sag Immunity
. F108-0310——用于半导体、平板显示、太阳能电池制造的液体化学试剂管道传送部件指南：Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
. M6-1108——用于制造光伏电池的硅晶圆规格说明：Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
. M44-0305——硅中间隙氧转化因素指南：Guide to Conversion Factors for Interstitial Oxygen in Silicon
. ME391-0310——利用稳态表面光电压测试方法测量非本征半导体中少数载流子扩散长度的方法：Test Method for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-State Surface Photovotake
. MF1188-1107——利用短基线红外吸收法测量硅中间隙氧含量的方法：Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline
. MF1619-1107——利用在布鲁斯特角进行p型极化入射获得红外吸收光谱测量硅晶圆中间隙氧含量的测试方法：Test Method for Measurement of Interstitial Oxygen Content
of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle
. MF1727-0304——检测抛光硅晶圆中因氧化导致缺陷的操作方法：Practice for Detection of Oxidation Induced Defects in Polished Silicon Wafers
. MF 1809-0704——表征硅中结构性缺陷的刻蚀方案的选择与使用指南：Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon
. MF 1810-0304——硅中优先刻蚀或缀饰的表面缺陷的计量测试方法：Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers
. PV1-0709——利用高质量分辨率辉光放电质谱测量光伏级硅中微量元素的方法：Test Method for Measuring Trace Elements in Photovoltaic-Grade Silicon by High-Mass Resolution Glow Discharge Mass Spectrometry
. PV2-0709E——光伏设备通信接口指南（PV ECI）：Guide for PV Equipment Communication Interfaces －Unified communication standard between PV production equipment and the shop floor
. PV3-0310——用于光伏电池处理工艺的高纯水指南：Guide for High Purity Water Used In Photovoltaic Cell Processing
. PV4-0710——用于光伏应用薄膜第五代衬底尺寸范围的规范：Specification for range of 5th generation substrate sizes for thin-film Photovoltaic application
. PV5-1110——用于光伏行业的氧气（大宗气体）指南：Guide for Oxygen (O2), Bulk, Used In Photovoltaic Applications
. PV6-1110——用于光伏行业的氩气（大宗气体）指南：Guide for Argon (Ar), Bulk, Used In Photovoltaic Applications
. PV7-1110——用于光伏行业的氢气（大宗气体）指南：Guide for Hydrogen (H2), Bulk, Used In Photovoltaic Applications
. PV8-1110——用于光伏行业的氮气（大宗气体）指南：Guide for Nitrogen (N2), Bulk, Used In Photovoltaic Applications
. PV11-1110——用于光伏行业的氢氟酸规格说明：Specifications for Hydrofluoric Acid, Used In Photovoltaic Applications
. PV12-1110——用于光伏行业的磷酸规格说明：Specifications for Phosphoric Acid, Used In Photovoltaic Applications
. PV9-1110——利用非接触式的微波反射光电导衰减法测量光伏用硅材料的多余载流子寿命的测量方法：Test Method for Excess Charge Carrier Lifetime in PV Silicon Materials by Non-Contact Measurements of Photoconductivity Decay By Microwave Reflectance
. PV10-1110——用仪器中子活化分析测量硅材料的方法：Test Method for Instrumental Neutron Activation Analysis (INAA) Of Silicon
查询进一步信息，请访问http://www.corporate.semi.org.cn/。
