
【产通社,3月10日讯】国际半导体设备材料产业协会(SEMI)网站消息,其日前面向半导体、MEMS、FPD和光伏(photovoltaic,PV)制造行业公布了9项新标准。这些新标准由来自设备和材料供应商、器件制造商和SEMI国际标准计划(SEMI International Standards Program)参与者的技术专家共同制订,具体网址为http://www.semi.org/semiviews.
这些新标准还包括了一项关于光伏(PV)制造工艺中的专用高纯晶圆(high-purity water,HPW)测试方法。新方法对工厂和生产车间里的操作规范定义非常有帮助。同时,这也是目前为止光伏领域第一个,也是唯一一个关于HPW的技术标准。
这些新标准名单如下:
SEMI D55 — Guide for Evaluation Method of Color Performance for Color Filter Assemblies (Evaluation Method of Color Purity)
SEMI D56 — Measurement Method for Ambient Contrast of Liquid Crystal Displays
SEMI D57 — Definition Measurement Index (VCT) for Mura in FPD Image Quality Inspection
SEMI D58 — Terminology and Test Pattern for the Color Breakup of Field Sequential Color Display
SEMI E154 — Mechanical Interface Specification for 450 mm Load Port
SEMI E155 — Specification for Sensor Actuator Network for Motionnet® Communication
SEMI F108 — Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
SEMI PV3 — Guide for High Purity Water Used in Photovoltaic Cell Processing
SEMI S27 — Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
除了上述新标准,SEMI还对以前发布的SEMI S7进行了更新。查询更多标准信息,请访问http://www.semi.org/,或者联系:
Steve Buehler/SEMI
Tel: 408.943.7049
Email: sbuehler@semi.org
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